Be careful of the sprayers you get at the garden stores... they are packed with grease at the seals.
Check that they can be disassembled and cleaned before purchasing.
I rinse with distilled water spray (each step) paying special attention to areas that can trap the solution (each rince is allowed to drain into the solution tank). After rinsing, I submerge the parts in in fresh distilled water.
After ano, same thing except after the rinse, a quick dunk in the neutralizer tank (as precision PB suggests), then the distilled water tank.
I go through lots of distilled water!
I should buy a reverse osmosis setup.