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Originally Posted by kebo
After each process I measure the oxide using a calibrated isoscope, and have found that the oxide is typically +-7% of the target oxide thickness.
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Perhaps I missunderstood what kebo meant in the above statement. If I understand you correctly sswee, you understand kebo's statement to mean that he is within +-7% of his target thickness? I understood kebo's statement to mean that he has only achieve +-7% of the projected thickness.
Having said that, if you are within +-7% of the projected thickness kebo then job well done! I would think that any of use would be very happy with those results. On the other hand, if you have only produced an oxide thickness of +-7% of the projected thickness, then perhaps one of the factors mentioned above is a little wacky.
I am somewhat unclear as to what you are asking kebo...Then again, it doesn't take much to confuse us canucks! Just show us something shiny which makes a "whirling" sound and we'll tilt our heads in utter awe and confusion.